Wafer carrier
US5417767A · kind A · utility
Inventor
Key dates
| Filing date | Dec 28, 1993 |
| Grant date | May 23, 1995 |
| Priority date | — |
| Expiry date | Dec 28, 2013 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67326
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A wafer carrier which supports at least one wafer, during a process in which material is deposited on the wafer from chemical vapor in a reactor, includes a base having an inner curved surface extending from a first lateral edge of the base to a second lateral edge of the base. Slots in the inner surface of the base extending generally continuously from the first lateral edge to the second lateral edge are defined by a bottom wall and opposing side walls. The slots may each receive at least a portion of a thin, outwardly facing edge of the wafer for holding the wafer in an upright position. The bottom wall of the slot closely conforms to the predetermined shape of the portion of the outwardly facing peripheral edge of the wafer to inhibit the entry of vapor between the base and the outwardly facing edge of the wafer and the formation of material bridges between the wafer and the carrier by deposition of the material from the chemical vapor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.