Method of cleaning workpiece with solvent and then with liquid carbon dioxide
US5417768A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 14, 1993 |
| Grant date | May 23, 1995 |
| Priority date | — |
| Expiry date | Dec 14, 2013 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB08B7/0021
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A method for precision cleaning of a workpiece with a cleaning fluid comprising liquid and/or supercritical fluid carbon dioxide and a primary solvent which is liquid at ambient temperatures and pressures comprises first placing the workpiece in a pressurizable vessel with a removable lid and within an inner tank open at the top; supplying the primary solvent to the inner tank; flushing the primary solvent through the pressure vessel; draining the inner tank to remove the primary solvent; and then supplying liquid and/or supercritical fluid carbon dioxide to the pressure vessel and flushing it through the vessel by withdrawing it from near the bottom of the inner tank.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.