Detection of fluids with metal-insulator-semiconductor sensors
US5417821A · kind A · utility
48Cited by
23References
20Claims
0Family size
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Inventor
Key dates
| Filing date | Nov 2, 1993 |
| Grant date | May 23, 1995 |
| Priority date | — |
| Expiry date | Nov 2, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N27/129
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A MIS diode sensor having a Pd/Cu alloy electrode is sensitive to and can detect CO, H.sub.2, C.sub.2 H.sub.2 and C.sub.2 H.sub.4. An array of MIS diode sensors having varying electrode compositions can indicate a fault in an electrical transformer by the detection of at least one of the key fault gases CO, H.sub.2, C.sub.2 H.sub.2 and C.sub.2 H.sub.4.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.