Organic stripping composition
US5417877A · kind A · utility
67Cited by
5References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 30, 1992 |
| Grant date | May 23, 1995 |
| Priority date | — |
| Expiry date | Nov 30, 2012 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/425
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
Organic stripping composition for photoresists comprising organic polar solvents and basic amines which includes an inhibitor which forms a coordination complex with a metal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.