Patent · US Expired

N-type antimony-based strained layer superlattice

US5420442A · kind A · utility

8Cited by
4References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 5, 1994
Grant dateMay 30, 1995
Priority date
Expiry dateApr 5, 2014

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S438/938
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

High speed Group III-Sb materials are n-doped in a molecular beam epitaxy process by forming a superlattice with n-doped strained layers of a Group III-V compound upon Group III-Sb base layers. The base layers have lower conduction band energy levels than the strained layers, and allow doping electrons from the strained layers to flow into the base layers. The base layers preferably comprise Al.sub.x Ga.sub.1-x Sb, while the strained layers preferably comprise a binary or ternary compound such as Al.sub.y Ga.sub.1-y As having a single Group V component, where x and y are each from 0 to 1.0. The strained layers can be n-doped with silicon or tin, which would produce p-type doping if added directly to the base layers.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.