Transfer apparatus and method
US5421695A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Sep 3, 1993 |
| Grant date | Jun 6, 1995 |
| Priority date | — |
| Expiry date | Sep 3, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/20317
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
A transfer apparatus for moving a transfer stage. Two pairs of links are joined by a first pair of shafts. Each pair of links includes two arms joined together by a corresponding, respective shaft of the first pair of shafts. A second pair of shafts are driven by a driving unit. Each shaft of the second pair of shafts corresponds to a respective pair of links of the two pair of links and is attached to a first end of the corresponding pair of links. A third pair of shafts supports the transfer stage, each shaft of the third pair of shafts corresponding to a respective pair of links of the two pair of links and being attached to a second end of the corresponding pair of links. The second pair of shafts is inclined with respect to a perpendicular direction to the transfer direction of the transfer stage, to form an angle between the shafts of the second pair of shafts. One shaft of the first pair of shafts, one shaft of the third pair of shafts and one shaft of the second pair of shafts are parallel to each other. The other shaft of the first pair of shafts, the other shaft of the third pair of shafts and the other shaft of the second pair of shafts are parallel to each other. A magn…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.