Load-lock drum-type coating apparatus
US5421979A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Aug 3, 1993 |
| Grant date | Jun 6, 1995 |
| Priority date | — |
| Expiry date | Aug 3, 2013 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67745
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Vacuum coating apparatus (30) includes a coating chamber (32), and a load-lock chamber (34) connected to the coating chamber via a high vacuum valve (44). The coating chamber includes deposition-devices (123) and a cylindrical or drum shaped substrate-transporter (100) for transporting substrates (64) past the deposition-devices. Substrates are carried on substrate-carriers (66) which are configured to fit into transport-stations (102) around the periphery of the substrate-transporter. A magazine (61) holding a plurality of substrate-carriers is located in the load-lock chamber. An injector arrangement (120) is provided for ejecting a substrate-carrier from the magazine, transporting the substrate-carrier through the high vacuum valve, and inserting the substrate-carrier into a transport-station of the substrate-carrier.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.