Process for hydrogenation of tetrachlorosilane
US5422088A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 28, 1994 |
| Grant date | Jun 6, 1995 |
| Priority date | — |
| Expiry date | Jan 28, 2014 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J12/00
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An improved process for contacting hydrogen gas and tetrachlorosilane in a reactor comprising a pressurizable shell having located therein a reaction vessel forming a substantially closed inner chamber for reacting the hydrogen gas with the tetrachlorosilane. The improvement comprises feeding to an outer chamber between the pressurizable shell and the reaction vessel a gas or gaseous mixture having a chlorine to silicon molar ratio greater than about 3.5. The improvement reduces the concentration of hydrogen and tetrachlorosilane in the outer chamber that results from leakage of these gases from the substantially closed inner chamber and the detrimental reactions associated with such leakage on structural elements and performance of the reactor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.