Plate-like member conveying apparatus
US5423503A · kind A · utility
12Cited by
3References
32Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 5, 1993 |
| Grant date | Jun 13, 1995 |
| Priority date | — |
| Expiry date | May 5, 2013 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67781
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A plate-like member conveying apparatus includes five holding arms arranged parallel to each other in one direction and capable of supporting wafers, a link mechanism for connecting said holding arms to each other and for, when at least one holding arm is moved in the one direction, moving the remaining holding arms such that the pitch thereamong is equal, and a nut-screw driving mechanism for moving the at least one holding arm in the one direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.