Substrate internal defect and external particle detecting apparatus using s-polarized and p-polarized light
US5424536A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Mar 22, 1994 |
| Grant date | Jun 13, 1995 |
| Priority date | — |
| Expiry date | Mar 22, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/9505
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A defect estimating apparatus includes a laser radiating unit For obliquely radiating laser light on a surface to be observed of an object to be inspected, an observing unit for observing, through the surface to be observed, scattered light produced From internal defects or particles of the object by refracted light of the laser light, and observing scattered light or reflected light produced from flaws or particles on the surface by tile laser light, and a component separating unit for allowing the observing unit to perform observation by using both light containing primarily a p-polarized light component of the laser light and light containing primarily an s-polarized light component of the laser light.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.