Inter-pixel thermal isolation for hybrid thermal detectors

US5424544A · kind A · utility

Assignee

• TEXAS INSTRUMENTS INCORPORATED · US

Inventors

• Gail D. Shelton · Mesquite, US
• James F. Belcher · Plano, US
• Steven N. Frank · McKinney, US
• Charles M. Hanson · Richardson, US
• Edward G. Meissner · Allen, US
• Robert A. Owen · Faringdon, GB

Key dates

• Filing date: Apr 29, 1994
• Grant date: Jun 13, 1995
• Expiry date: Apr 29, 2014

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10N15/10
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A thermal detection system (100, 200) includes a focal plane array (102, 202), a thermal isolation structure (104, 204) and an integrated circuit substrate (106, 206). The focal plane array (102, 202) includes thermal sensors (114, 214) formed from a pyroelectric element (116, 216), such as barium strontium titanate (BST). One side of the pyroelectric element (116, 216) is coupled to a contact pad (110, 210) disposed on the integrated circuit substrate (106, 206) through a mesa strip conductor (112, 212) of the thermal isolation structure (104, 204). The other side of the pyroelectric element (116, 216) is coupled to a common electrode (120, 220). In one embodiment, slots (128) are formed in the common electrode (120) intermediate the thermal sensors (114) to improve inter-pixel thermal isolation. In another embodiment, slots (236) are formed in the optical coating (224) to improve inter-pixel thermal isolation. The common electrode (120, 220) may be formed from a thermally insulating material, such as a silicon monoxide and chromium matrix (cermet) or other metal oxide.