Light shield for a back-side thinned CCD
US5424574A · kind A · utility
3Cited by
13References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 14, 1994 |
| Grant date | Jun 13, 1995 |
| Priority date | — |
| Expiry date | Feb 14, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S257/908
Abstract
A light shield for a back-side thinned CCD has an aluminum reflective layer over the imaging surface of the CCD with a vanadium barrier layer between the aluminum reflective layer and the imaging surface. An optional oxide layer may be formed between the reflective and barrier layers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.