Optical displacement sensor for measurement of shape and coarseness of a target workpiece surface
US5424834A · kind A · utility
19Cited by
6References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 18, 1993 |
| Grant date | Jun 13, 1995 |
| Priority date | — |
| Expiry date | Jun 18, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/30
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical displacement sensor that has a light beam polariscope located on the light path of light reflected from a target surface, and means for detecting the focal point position and transverse position of the light beam from the polariscope. The focal point position corresponds to axial displacement at the target surface, and the transverse position corresponds to inclination of the target surface, so the effect of the inclination of the surface can be compensated for by using a transverse position detection signal to adjust the light beam polariscope.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.