Method of making a transformer for monolithic microwave integrated circuit
US5425167A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 29, 1994 |
| Grant date | Jun 20, 1995 |
| Priority date | — |
| Expiry date | Aug 29, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49073
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A passive transformer which can be formed in an MMIC having a plurality of first-layer wirings formed on a substrate so that each of the first-layer wirings intersects a desired virtual line on the substrate; an insulating film for covering a substrate surface on which the first-layer wirings are formed; and a plurality of second-layer wirings formed on the insulating film so that each of the second-layer wirings intersects the virtual line and has opposite ends respectively connected to different ends of the first-layer wirings through contact holes. An inductor element having a spiral structure along the virtual line constitutes the first-layer wirings the contact holes and the second-layer wirings. The opposite ends of the inductor element are primary electrodes, and one end and a desired intermediate point of the inductor element are secondary electrodes. Because the transformer has such a structure, a three-dimensional coil can be formed on the substrate so that the transformer can be formed in an MMIC.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.