Patent · US Expired

Portable GCMS system using getter pump

US5426300A · kind A · utility

17Cited by

21References

21Claims

0Family size

Assignee

Leybold Inficon, Inc. · US

Inventors

Gunter Voss · Herrsching am Ammersee, DE
Stephan J. DeLuca · Meadville, US
Gregory L. Adams · Jamesville, US

Key dates

Filing date	Sep 17, 1993
Grant date	Jun 20, 1995
Priority date	—
Expiry date	Sep 17, 2013

Classification

Technology area (CPC G)Physics
CPC primaryG01N2030/0095
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A gas analyzing system that includes a vacuum chamber containing a mass spectrometer and a sampling device for introducing a gas sample into the chamber. A sorption pump is operatively connected to the chamber which is capable of maintaining the chamber at a high vacuum. The pump includes a diffusion barrier that provides smooth pumping characteristics and repeatable short term system behavior when sample pulses are introduced into the system.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.