Thermal isolation structure for hybrid thermal detectors

US5426303A · kind A · utility

Assignee

• TEXAS INSTRUMENTS INCORPORATED · US

Inventors

• Robert A. Owen · Faringdon, GB
• John P. Long · Garland, US
• Bert T. Runnels · Garland, US
• Gail D. Shelton · Mesquite, US
• William K. Walker · Plano, US

Key dates

• Filing date: Apr 29, 1994
• Grant date: Jun 20, 1995
• Expiry date: Apr 29, 2014

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10N15/10

Abstract

A thermal detection system (10, 110, 210) includes a focal plane array (20, 120, 220), a thermal isolation structure (40, 140, 240), and an integrated circuit substrate (60, 160, 260). The focal plane array (20, 120, 220) includes a plurality of thermal sensors (30, 130, 230). The thermal isolation structure (40, 140, 240) includes mesa-type formations (44, 146, 148, 244) and bridge structures (42, 142, 144, 242) that provide thermal isolation, signal transport, and structural support of the focal plane array (20, 120, 220) when mounted on the integrated circuit substrate (60, 160, 260). Thermal detection system (10) includes an infrared absorber and common electrode assembly (22) which provides a bias voltage to all thermal sensors (30). Thermal detection system (110) has a plurality of electrically isolated thermal sensors (130), each thermal sensor (130) is supported by bridge structures (142, 144), which provide a bias voltage to and receive a signal voltage from the thermal sensor (130). Thermal detection system ( 220) has a plurality of electrically isolated thermal sensors (230), each thermal sensor (230) is electrically coupled to a pair of leads (246, 247), which are suppo…