Data compaction techniques for generation of a complex image
US5428552A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 5, 1994 |
| Grant date | Jun 27, 1995 |
| Priority date | — |
| Expiry date | May 5, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T9/001
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A data compaction technique permits electron beam lithography systems to operate more efficiently in the fabrication of complex computer chips. One or more building block patterns are selected for the design to be encoded. Each shape in the set of building block patterns is given a sequence number for use in a data word for the design. The set of shape descriptors for each block is stored in a reference memory. The data word referencing a block includes a number of bytes which specify the stored block pattern data and control bits corresponding to sequence numbers of the pattern shapes in a maximum shape configuration. Each shape is assigned a bit according to its sequence number.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.