Method and apparatus for cleaning a processing tube
US5428861A · kind A · utility
4Cited by
9References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 2, 1993 |
| Grant date | Jul 4, 1995 |
| Priority date | — |
| Expiry date | Aug 2, 2013 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB08B9/0433
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A method for cleaning a processing tube is performed by an apparatus providing a vacuum and a flow of an inert gas. The flow of the inert gas dislodges particles from the tube surface and assists in carrying the particles to the vacuum. The vacuum is centered in the tube, thus preventing the sides of the tube from being scraped. Wheels are attached to the vacuum means to facilitate cleaning of the tube.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.