Method of manufacturing a micro-valve
US5429713A · kind A · utility
4Cited by
15References
1Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 24, 1994 |
| Grant date | Jul 4, 1995 |
| Priority date | — |
| Expiry date | Feb 24, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/86895
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
Described is a method of manufacturing a silicious micro-valve comprising the steps of providing a first silicious substrate; removing a portion of the first substrate to reveal the 111 planes of the first substrate; drawing an epitaxial layer to conform to the 111 planes of the first substrate; and assembling the first substrate and the epitaxial layer as two separate identical pieces to form a micro-valve having 111 planes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.