Piezoelectric/electrostrictive element having ceramic substrate formed essentially of stabilized zirconia
US5430344A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 9, 1994 |
| Grant date | Jul 4, 1995 |
| Priority date | — |
| Expiry date | May 9, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/2047
Abstract
A piezoelectric/electrostrictive element including a thin ceramic substrate, and a piezoelectric/electrostrictive portion formed on the ceramic substrate by a film forming technique without an adhesive agent, the piezoelectric/electrostrictive portion consisting essentially of a plurality of electrodes and at least one piezoelectric/electrostrictive layer. The ceramic substrate is formed of a material which includes as a major component zirconia having a crystal phase that is stabilized by addition of at least one compound selected from the group consisting of: yttrium oxide, ytterbium oxide, cerium oxide, calcium oxide and magnesium oxide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.