Reed contactor and process of fabricating suspended tridimensional metallic microstructure
US5430421A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 14, 1993 |
| Grant date | Jul 4, 1995 |
| Priority date | — |
| Expiry date | Dec 14, 2013 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2036/0093
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A reed contactor includes a base plane comprising two distinct conducting zones. Two shafts of the contactor have the form of blades, each of which engages a base plane at the level of one of the conducting zones. One of the beams at least is supported on the base plane by means of a foot on which it is mounted in an overhanging manner. The contactor is formed by process comprising the steps of forming successively on a substrate an alternance of levels of photoresist and of metallization. At each step, the level of upper photoresist is configured to create in its thickness free growth spaces in which metal pins are formed by galvanic growth. The levels of photoresist situated under the last level of metallization play the role of sacrificial layers and allow the formation of suspended metallic structures.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.