Apparatus for purifying laser gas

US5430752A · kind A · utility

Assignee

• Lambda Physik Gesellschaft zur Herstellung von Larsen GmbH · DE

Inventors

• Dirk Basting · Fort Lauderdale, US
• Gerd Steinfuhrer · Bovenden, DE
• Frank Voss · Berlin, DE

Key dates

• Filing date: Jun 9, 1994
• Grant date: Jul 4, 1995
• Expiry date: Jun 9, 2014

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01S3/225
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An apparatus for purifying laser gas, in particular for excimer and F.sub.2 lasers, employs liquid nitrogen (12) for freezing impurities out of the laser gas, the freeze-out temperature being set by means of the pressure above the surface (14) of the liqid nitrogen (12).