Method of forming optical light guides through silicon
US5431775A · kind A · utility
13Cited by
2References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 29, 1994 |
| Grant date | Jul 11, 1995 |
| Priority date | — |
| Expiry date | Jul 29, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12061
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of forming optical light guides through silicon is disclosed wherein such light guides extend from a first (or front) surface along a preferred crystallographic direction to a second (or back) surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.