MIM-type electric device production thereof, and electronic apparatus employing the device
US5432379A · kind A · utility
17Cited by
4References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 14, 1994 |
| Grant date | Jul 11, 1995 |
| Priority date | — |
| Expiry date | Sep 14, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2201/3125
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An MIM type electric element has an upper electrode, a lower electrode, and a barrier layer held therebetween and composed of an insulator or a semiconductor. The lower electrode contains a noble metal crystal having a facet of a plate-shaped crystal formed on a substrate. The facet has a plane given by the crystal face (111) and contains a region having a plane orientation variance angle of not more than 1.degree. by X-ray diffraction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.