Interferometer for the measurement of surface profile which introduces a spatial carrier by tilting the reference mirror
US5432606A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 10, 1994 |
| Grant date | Jul 11, 1995 |
| Priority date | — |
| Expiry date | Jan 10, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/2441
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This invention relates to a means of analyzing the shape of a surface to be measured by generating interference fringes containing a spatial carrier produced by tilting the wavefronts from a reference surface and the surface to be measured, taking several measurements of these interference fringes while varying the optical path length of the reference surface by means of a phase shift device, applying a spatial fringe scan method to the interference fringe data so as to detect the optical path length variation produced by the phase shift device, applying a temporal fringe scan method to this optical path length variation and several interference fringe data so as to analyze the interference fringes, and then subtracting the spatial carrier from the analytical results.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.