Integrated optical circuit having a waveguide end of lens geometry, and method for making same
US5432877A · kind A · utility
22Cited by
4References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 3, 1994 |
| Grant date | Jul 11, 1995 |
| Priority date | — |
| Expiry date | Jun 3, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/4249
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method and apparatus are disclosed whereby integrated optical circuits having waveguide ends of lens geometry are formed which improve the waveguide's optical coupling to light sources and detectors. A channel waveguide is formed on a substrate and the waveguide ends are shaped into lens form by etching to form a protrusion and heating the waveguide to or above the softening temperature of core material of the waveguide resulting in surface tension in the core material that functions to shape the protrusion into a substantially cone-shaped lens end having a smooth surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.