Apparatus for measuring the life time of minority carriers of a semiconductor wafer
US5438276A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | May 12, 1993 |
| Grant date | Aug 1, 1995 |
| Priority date | — |
| Expiry date | May 12, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2656
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for measuring the life time of minority carriers includes a light source for irradiating a first region of a semiconductor wafer, a microwave generator for generating microwaves, a transmission line for transmitting a first part of the generated mark raised to the region of the semiconductor wafer that is radiated by the excitation light and a second portion of the generated microwave to a region of the semiconductor wafer that is not radiated by the excitation light. The intensity of the microwave signals reflected from the semiconductor wafer are detected and the life time of the minority carriers is calculated based upon the detected intensities.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.