Patent · US Expired

Gas discharge displays and methodology for fabricating same by micromachining technology

US5438343A · kind A · utility

28Cited by
8References
12Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 30, 1993
Grant dateAug 1, 1995
Priority date
Expiry dateDec 30, 2013

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01S3/0973
  • WIPO fieldElectrical machinery, apparatus, energy
  • WIPO sectorElectrical engineering

Abstract

A gas discharge display and the method of making same utilizing integrated circuit fabrication techniques. The display is manufactured from heat and pressure resistant planar substrates in which cavities are etched, by integrated circuit manufacturing techniques, so as to provide individual pixels. Orthogonal electrodes are deposited on the substrates and extend into the cavities. The cavities are filled with gas discharge materials, such as plasma, upon energization of the electrodes the individual cavities forming the pixels may be individually activated.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.