Linearly fine-adjustable stage
US5438451A · kind A · utility
28Cited by
8References
10Claims
0Family size
Inventor
Key dates
| Filing date | Sep 17, 1993 |
| Grant date | Aug 1, 1995 |
| Priority date | — |
| Expiry date | Sep 17, 2013 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16C2322/39
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
The stage plate of a sample carrying stage for optical instruments has a piezoelectric translator that drives the stage plate centrally and directly, and a linear guide comprising at least two elastic elements to guide the stage plate. The elastic elements are arranged coaxially to the piezoelectric translator, which extends through a central recess in the elastic elements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.