Patent · US Expired

Rotation rate sensor

US5438870A · kind A · utility

14Cited by

3References

4Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Erich Zabler · Blankenloch, DE
Jiri Marek · Reutlingen, DE

Key dates

Filing date	Dec 30, 1993
Grant date	Aug 8, 1995
Priority date	—
Expiry date	Dec 30, 2013

Classification

Technology area (CPC G)Physics
CPC primaryG01C19/5755
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A rotation rate sensor has a multi-layer structure including a monocrystalline silicon layer (10) which forms a carrier structure and a polysilicon layer (21), forming a second layer, and which includes a structural element (30) which acts as an oscillatory body. This structural element (30) is supported on the carrier structure (10) by a plurality of support strips (31), and is deflectable (2) perpendicularly to the major surface of the carrier structure (10). Capacitative or piezo-resistive detecting elements are formed from the second layer for detecting Coriolis force deflections (2), perpendicular to the major surface of said carrier (10) of the structural element (30).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.