Method and apparatus for illuminating target specimens in inspection systems
US5440127A · kind A · utility
39Cited by
10References
17Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 17, 1993 |
| Grant date | Aug 8, 1995 |
| Priority date | — |
| Expiry date | May 17, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S250/91
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An illumination system (12) for an optical inspection and sorting apparatus (10) includes a rare gas discharge lamp (36) for emitting select wavelengths of radiation. Rare gas discharge lamp (36) includes a light transmissive outer envelope (58) and contains one or more rare gases, and in particular neon, argon, or xenon. A hemi-elliptical reflector (48) having reflecting surface (38) directs the select wavelengths of radiation toward target specimens (16) in optical scanning area (24) in illumination area (20).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.