Phase detection deflectometer-type optical device having a large measuring range
US5440383A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 30, 1993 |
| Grant date | Aug 8, 1995 |
| Priority date | — |
| Expiry date | Nov 30, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/4233
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical device, of the deflectometer type, particularly with phase detection, comprises a light source, a surface to be tested, a semi-reflective surface between the light source and the surface to be tested to deflect the light beam reflected by the surface to be tested, a grating placed adjacent a focal region of the reflected light beam, and a CCD camera coupled to a data processor. Between the grating and the CCD camera there is a primary objective (19) with a large entry pupil supplying an intermediate image, a ground glass (20) adapted to receive this intermediate image, and a secondary optical system (21) through which the intermediate image passes which is formed on the ground glass (20) and which forms a final image on the a detector (6) of the CCD camera.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.