Servo-controlled pendular micro-sensor
US5440939A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 6, 1993 |
| Grant date | Aug 15, 1995 |
| Priority date | — |
| Expiry date | Apr 6, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/131
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An electrostatically servo-controlled pendular micro-sensor includes a pendular element disposed so as to respond to a force representative of a physical quantity to be measured. To avoid the drifts affecting the stability of the micro-sensor, generated by the existence of unstable parasitic voltages that impair the voltages provided by a system servo-controlling the pendular element, the electrostatic forces generated to draw back the pendular element through servo-control voltages have a zero mean value. The control voltages are periodic voltages or series of electric signals of equal durations, each having, preferably, a zero mean value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.