Thermal sensing scanning probe microscope and method for measurement of thermal parameters of a specimen
US5441343A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 27, 1993 |
| Grant date | Aug 15, 1995 |
| Priority date | — |
| Expiry date | Sep 27, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/867
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The scanning thermal probe microscope measures a thermal parameter such as thermal conductivity or temperature of surface contours of a specimen with a thermal sensor maintained in thermal communication with the surface of the specimen and maintained at a temperature different than that of the specimen. The thermal sensor is disposed on the free end of a cantilever arm in thermal communication with the probe. A thermal feedback bridge circuit can maintain the thermal sensor at a constant temperature by heating or cooling the sensor, and provides a signal for determining the heat transfer between the probe and the specimen. The cantilever arm includes first and second legs of electrically conductive material, and the thermal sensor comprises a narrowed portion of the conducting material having a relatively high temperature coefficient of resistance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.