Capacitive pressure sensor having a pedestal supported electrode
US5442962A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Aug 20, 1993 |
| Grant date | Aug 22, 1995 |
| Priority date | — |
| Expiry date | Aug 20, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0072
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A capacitance pressure sensor includes a conductive diaphragm positioned between two pneumatically separate chambers. The diaphragm is supported at its periphery by a concave base member. An electrode assembly establishes a substantially planar conductive surface opposite to, and spaced apart by a nominal gap from, the conductive diaphragm. The electrode assembly includes the conductive surface and a single support element secured to, and extending through the base member. A glass dielectric fixes the support element to a collar which may be welded, brazed or soldered to the base member. The glass dielectric provides both mechanical support and high quality electric insulation between the electrode and the housing. By prefabricating the electrode support element with the collar and securing the collar to the housing after the dielectric has cured, problems associated with thermal expansion and contraction are avoided and the dimension of the nominal gap may be precisely controlled at a relatively low cost.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.