Turbomolecular pump with valves and integrated electronic controls
US5443368A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 16, 1993 |
| Grant date | Aug 22, 1995 |
| Priority date | — |
| Expiry date | Jul 16, 2013 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04D27/001
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A vacuum system comprises, as an integral assembly, a turbomolecular pump with drive motor, a vent valve, a purge valve, a roughing valve, a heater and an electronic control module. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. Proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.