Sealing method for reaction gases
US5443860A · kind A · utility
3Cited by
2References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 2, 1994 |
| Grant date | Aug 22, 1995 |
| Priority date | — |
| Expiry date | Mar 2, 2014 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/54
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Reaction gases are prevented from escaping from a reaction chamber through the use of flexible or gas seals between the interface of the reaction chamber and the junction used to connected successive reaction chambers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.