Fluid treatment apparatus and method
US5444925A · kind A · utility
1Cited by
1References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 9, 1993 |
| Grant date | Aug 29, 1995 |
| Priority date | — |
| Expiry date | Dec 9, 2013 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K3/227
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A new apparatus for treating substrates with fluids, as well as a corresponding fluid treatment method, is disclosed. The new apparatus includes a new configuration of fluid jet injectors which substantially overcomes the problem of dragout, in which fluid impinged upon an area of a substrate is retained on that area, preventing fresh fluid from reaching the impinged area. This new configuration also avoids imposing torques on substrates, and substantially reduces the need for rollers and guides for transporting substrates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.