Angular velocity sensor having a balanced tuning fork structure and the method of manufacture
US5445025A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 15, 1993 |
| Grant date | Aug 29, 1995 |
| Priority date | — |
| Expiry date | Jul 15, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5607
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An angular velocity sensor having a tuning-fork structure comprising a first vibrator including a first actuator and a first detector each attached to a metal plate and joined orthogonally to each other, and a second vibrator including a second actuator and a second detector each attached to another metal plate and joined orthogonally to each other, the two vibrators being coupled by an electrode block to each other in a generally parallel relationship along the axis of detection of the sensor. The first and second detectors have a rectangular plate shape each holding a piezoelectric element. The rectangular plate shape has a lengthwise edge and a widthwise edge where the lengthwise edge parallel to the axis of detection of the sensor and is longer than the width wise edge. At least one of the lengthwise edges of the detectors has a beveled surface formed by removing metal at an angle from the lengthwise edge of the detector to balance the sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.