Method for making high thermal conducting diamond
US5445106A · kind A · utility
6Cited by
4References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Oct 3, 1994 |
| Grant date | Aug 29, 1995 |
| Priority date | — |
| Expiry date | Oct 3, 2014 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B29/04
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method is disclosed for producing continuous CVD diamond films with at least two controlled diamond thermal conductivity layers having improved thermal conductivity in the direction parallel to the diamond film plane to increasing the lateral heat spreading ability of the diamond film. Also, disclosed is a method to decrease the time to deposit high thermal conducting diamond by chemical vapor deposition.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.