Method for multichamber sheet-after-sheet type treatment
US5445491A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 26, 1992 |
| Grant date | Aug 29, 1995 |
| Priority date | — |
| Expiry date | Aug 26, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/139
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In a multichamber type sheet-after-sheet type of treating apparatus, there are provided an inlet/outlet port capable of independently control pressure and atmosphere in the port, a platform connected to the inlet/outlet port, a plurality of treating chambers connected to the platform, at least two supporting members in the inlet/outlet port for supporting a material to be treated, a hand formed in the platform for supporting the material, and a device for horizontally swinging the hand. In operation, the materials to be treated are treated in the treating chambers at different times, a treated material and a not yet treated material are exchanged between the inlet/outlet port and surrounding air, and one of treating chambers and the platform are interconnected after completion of the treatment for exchanging a treated material and a not yet treated material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.