Vacuum pump having parallel kinetic pump inlet section
US5445502A · kind A · utility
6Cited by
20References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 6, 1994 |
| Grant date | Aug 29, 1995 |
| Priority date | — |
| Expiry date | Jul 6, 2014 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04C2240/402
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A vacuum pump includes a positive displacement vacuum pump structure section disposed on a discharge opening side; a kinetic vacuum pump structure section, disposed on a suction opening side, for providing a high vacuum; and a kinetic vacuum pump structure section, disposed on a suction opening side, for providing a high pumping speed. The construction of the kinetic vacuum pump structure section is different from that of the kinetic vacuum pump structure section so as to differ relative thereto in one of ultimate pressure, pumping speed, and pumping speed of sucked gas with respect to a molecular weight of the sucked gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.