Rotatable magnetron including a replacement target structure
US5445721A · kind A · utility
18Cited by
5References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 25, 1994 |
| Grant date | Aug 29, 1995 |
| Priority date | — |
| Expiry date | Aug 25, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3405
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An improved rotatable magnetron enabling efficient removal and replacement of a target structure, having axially movable structures including at least one spindle, which may be extended to engage or retracted to disengage the target structure, and means for extending into a magnet structure within the target structure to selectively fix a rotational position of the magnet structure, and preferably having water and vacuum seals integrated into cartridges which are disposed between spindles and seal housings of the improved rotatable magnetron.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.