Laser interferometric single piece force transducer
US5446546A · kind A · utility
31Cited by
11References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 2, 1993 |
| Grant date | Aug 29, 1995 |
| Priority date | — |
| Expiry date | Jul 2, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L1/24
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A highly accurate force transducer with flanges and flexures to produce uniaxial flexibility and which utilizes a laser with retroreflectors and an interferometer detecting force movements with resolution of a fraction of a wavelength of light, typically 0.0000003 inch. A mechanical amplifier increases resolution, accuracy, and repeatability. Any deviation from uniaxial movement of the flanges/mirrors detected by three other retroreflector/interferometer systems may be stored in a computer and utilized to correct the force measurements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.