Angular velocity sensor having a tuning fork construction and its method of manufacture
US5447066A · kind A · utility
11Cited by
4References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 1, 1993 |
| Grant date | Sep 5, 1995 |
| Priority date | — |
| Expiry date | Sep 1, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5607
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to an angular velocity sensor utilized as a gyroscope and particularly, to a high-performance angular velocity sensor having a tuning-fork construction. The vibrator is formed of a metal base plate which is bent about 90 degrees along a center line defined by two opposite slits extending from their respective side edges to a central region of the metal base plate so that its two bent parts are orthogonal to each other. Two piezoelectric elements are bonded to the corresponding surfaces of the two parts of each vibrator which in turn serve as an actuator and a detector.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.