Polymeric coatings for micromechanical devices
US5447600A · kind A · utility
95Cited by
4References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 21, 1994 |
| Grant date | Sep 5, 1995 |
| Priority date | — |
| Expiry date | Mar 21, 2014 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/112
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for reducing sticking between contacting elements in a micromechanical device is disclosed. In addition, a micromechanical device is disclosed wherein the elements of the device are less likely to stick. The method for reducing sticking in a micromechanical device (10) comprises forming a protective layer (26) on a first contact element (14) to reduce the likelihood of a first contacting element (14) sticking to another contacting element (20). The protective layer (26) may be formed of a fluoro-polymer such as Teflon-AF.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.