Method and apparatus for sterilization of and treatment with ozonized water
US5447640A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 28, 1994 |
| Grant date | Sep 5, 1995 |
| Priority date | — |
| Expiry date | Jun 28, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S210/90
- WIPO fieldEnvironmental technology
- WIPO sectorChemistry
Abstract
Disclosed are a method for treatment with ozonized water which comprises feeding primary pure water to an ultrapure-water producing device containing at least a polisher to convert the primary pure water to ultrapure water, injecting an ozone-containing gas into the ultrapure water to produce ozonized water, sending the ozonized water to a point of use, using the ozonized water for treatment, and circulating the resulting spent ozonized water to the ultrapure-water producing device for reuse or discharging the spent water, wherein the method further comprises supplying a hydrogen-containing gas to the spent ozonized water at a point downstream from the use point to remove residual ozone from the ozonized water, a method for the ozone sterilization of ultrapure water which comprises feeding primary pure water from a primary-pure-water tank to an ultrapure-water producing device containing at least a polisher to convert the primary pure water to ultrapure water, sending the ultrapure water to a use point through a feed line, treating an object with the ultrapure water at the use point, and circulating the resulting spent pure water to the primary-pure-water tank through a return line…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.