Methods of fabricating integrated, aligned tunneling tip pairs
US5449903A · kind A · utility
33Cited by
19References
23Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 15, 1993 |
| Grant date | Sep 12, 1995 |
| Priority date | — |
| Expiry date | Jun 15, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/874
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Self-aligned, opposed, nanometer dimension tips are fabricated in pairs, one of each pair being located on a movable, single crystal beam, with the beam being movable in three dimensions with respect to a substrate carrying the other tip of a pair. Motion of one tip with respect to the other is controlled or sensed by transducers formed on the supporting beams. Spring means in each beam allow axial motion of the beam. The tips and beams are fabricated from single crystal silicon substrate, and the tips may be electrically isolated from the substrate by fabricating insulating segments in the beam structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.