Patent · US Expired

Ferroelectric thin film element

US5449933A · kind A · utility

8Cited by
1References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 30, 1993
Grant dateSep 12, 1995
Priority date
Expiry dateMar 30, 2013

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D1/682

Abstract

A ferroelectric thin film element 1 constructed by forming a MgO thin film 3 oriented in the direction (100), a lower electrode 4 composed of an alloy thin film of a Ni--Cr--Al system oriented in the direction (100), a ferroelectric thin film 5 composed of a PbTiO.sub.3 thin film oriented in the direction (111), and an upper electrode 6 in this order on a substrate composed of (100) silicon 2.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.