Construction and reconstruction of probe microscope images by function envelope methods
US5450505A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Nov 6, 1992 |
| Grant date | Sep 12, 1995 |
| Priority date | — |
| Expiry date | Nov 6, 2012 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/85
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
An invention provides an arrangement for accomplishing three objects. The first is correcting distortions caused by probe geometry in probe microscope or profilometer data. The second is calculating apparent probe data from models. The third is deducing the shape of the probe tip from a standard or reference sample. The correction of distorted images data is done by mathematically placing one or more known or hypothetical tip surfaces at one or more points of the distorted image surface to provide a reconstructed surface, which is the envelope surface formed by all such tip surfaces. The calculation of probe microscope image data from one or more mathematical models of sample surfaces is done by mathematically placing one or more known or hypothetical inverted probe tip surface at one or more points on the mathematical model surface, and taking the image surface to be the envelope formed by all such tip surfaces. The deduction of probe tip shape from an image of a known standard or reference surface at one or more points of the image surface, and taking the probe tip surface to be the envelope of all such standard or reference surfaces.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.